Designed for a graduate-level course in micromachined devices, or as an introduction to the field for practicing engineers, this book presents an overview of th

The revolution is well underway. Our understanding and utilization of microelectromechanical systems (MEMS) are growing at an explosive rate with a worldwide ma

This accessible text is now fully revised and updated, providing an overview of fabrication technologies and materials needed to realize modern microdevices. It

Bringing you up-to-date with the latest developments in MEMS technology, this major revision of the best-selling An Introduction to Microelectromechanical Syste

Co-integration of sensors with their associated electronics on a single silicon chip may provide many significant benefits regarding performance, reliability, m