Plasma processing is a central technique in the fabrication of semiconductor devices. This self-contained book provides an up-to-date description of plasma etch

Plasma processing is used for (approximately)35% of the process steps required for semiconductor manufacturing. Recent studies have shown that plasma processes

Plasma Processing of Semiconductors contains 28 contributions from 18 experts and covers plasma etching, plasma deposition, plasma-surface interactions, numeric

Plasma processing of materials is a critical technology to several of the largest manufacturing industries in the worldâ€"electronics, aerospace, automotive,

The MURI Center on Modeling and Control of Plasma Processing at the University of Michigan started in September, 1995, and concluded technical work at the end o