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Type: BOOK - Published: 1982 - Publisher:

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Proceedings of the 13th Annual Symposium of the Greater New York Chapter of the AVS on Plasma and Ion-beam Processing
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Proceedings of the Thirteenth Annual Symposium of the Greater New York Chapter of the AVS on Plasma and Ion-Beam Processing, 2 June 1982, IBM Thomas J. Watson Research Center, Yorktown Heights, New York
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