The GEC RF Reference Cell is a parallel plate, capacity-coupled, rf plasma reactor that, in principle, is suitable for studies of basic discharge phenomena, inv

Reports NIST research and development in the physical and engineering sciences in which the Institute is active. These include physics, chemistry, engineering,

An understanding of the processes involved in the basic and applied physics and chemistry of the interaction of plasmas with materials is vital to the evolution

The semiconductor industry's continued trend of manufacturing device features on the nanometer scale requires increased plasma processing control and improved u