A comprehensive MEMS textbook, with worked examples and numerous homework problems.

It is challenging at best to find a resource that provides the breadth of information necessary to develop a successful micro electro mechanical system (MEMS) d

The focus of this book is on the interactions of small particles, in the size range of microns to millimeters, with electric or magnetic fields. This field has

This book on mechanical microsensors is based on a course organized by the Swiss Foundation for Research in Microtechnology (FSRM) in Neuchatel, Swit zerland, a

Since they entered our world around the middle of the 20th century, the application of mechatronics has enhanced our lives with functionality based on the integ