This report contains details of the research work carried out on a one-year project on the growth and characterization of ZnO and AlN piezoelectric thin films.
Recently, piezoelectric materials, like lead titanate zirconate Pb(ZrxTi1-x)O3 (PZT), zinc oxide ZnO, and the solid solution Pb(Mg1/3Nb2/3)O3-PbTiO3 (PMN-PT), i