Growth and Characterization of Gallium Nitride on Lattice-matched Magnesium Calcium Oxide

Download or read book Growth and Characterization of Gallium Nitride on Lattice-matched Magnesium Calcium Oxide written by Andrew Phillip Gerger and published by . This book was released on 2009 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: Overgrowth nitride intact, lending itself to the concept of lift-off or pick-and-place. Transfer of GaN onto diamond substrates or other comparable materials would enable the high thermal conductivity and would facilitate the GaN devices to work at higher temperatures and power loads. The substrate transfer could be accomplished after the material growth or after the device fabrication was complete. In this work, the growth and characterization of single crystal MgCaO epitaxial films have been demonstrated. This has been demonstrated on single crystal GaN epifilms grown on sapphire, but SiC can be employed as well, eliminating the underlying GaN epifilm. Oxide thicknesses over 100nm with surface RMS roughness of less than 0.5nm have been achieved and employed as a successful substrate for nitride based overgrowth.