This book presents inductive and hybrid levitation micro-systems and their applications in micro-sensors and –actuators. It proposes and discusses analytical

This Springer Handbook comprehensively covers the topic of semiconductor devices, embracing all aspects from theoretical background to fabrication, modeling, an

This book presents the design and manufacturing of microsystems as well as necessary key technologies developed within the Collaborative Research Center 516. Th

For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book prov

This book is a printed edition of the Special Issue "Micromanipulation" that was published in Actuators