Plasma Nanoscience

Download or read book Plasma Nanoscience written by Kostya Ostrikov and published by John Wiley & Sons. This book was released on 2008-09-22 with total page 572 pages. Available in PDF, EPUB and Kindle. Book excerpt: Filling the need for a single work specifically addressing how to use plasma for the fabrication of nanoscale structures, this book is the first to cover plasma deposition in sufficient depth. The author has worked with numerous R&D institutions around the world, and here he begins with an introductory overview of plasma processing at micro- and nanoscales, as well as the current problems and challenges, before going on to address surface preparation, generation and diagnostics, transport and the manipulation of nano units.