Preparation and Characterization of Reactive RF Sputtered Nitride Thin Films
Author | : Geok Loo Chen |
Publisher | : |
Total Pages | : 226 |
Release | : 1999 |
ISBN-10 | : OCLC:969905608 |
ISBN-13 | : |
Rating | : 4/5 ( Downloads) |
Book Synopsis Preparation and Characterization of Reactive RF Sputtered Nitride Thin Films by : Geok Loo Chen
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