Process Modeling of Chemical Mechanical Polishing (CMP) Based Upon the Relationship Between Preston's Coefficient and Friction Coefficient
| Author | : Yongsik Moon |
| Publisher | : |
| Total Pages | : 60 |
| Release | : 1997 |
| ISBN-10 | : OCLC:46399920 |
| ISBN-13 | : |
| Rating | : 4/5 ( Downloads) |
Book Synopsis Process Modeling of Chemical Mechanical Polishing (CMP) Based Upon the Relationship Between Preston's Coefficient and Friction Coefficient by : Yongsik Moon
Download or read book Process Modeling of Chemical Mechanical Polishing (CMP) Based Upon the Relationship Between Preston's Coefficient and Friction Coefficient written by Yongsik Moon and published by . This book was released on 1997 with total page 60 pages. Available in PDF, EPUB and Kindle. Book excerpt:
