Structure and Properties of Titanium- and Hafnium- Nitride Films Prepared by Reactive Magnetron Sputtering

Structure and Properties of Titanium- and Hafnium- Nitride Films Prepared by Reactive Magnetron Sputtering
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Total Pages : 176
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ISBN-10 : 917871592X
ISBN-13 : 9789178715923
Rating : 4/5 (923 Downloads)

Book Synopsis Structure and Properties of Titanium- and Hafnium- Nitride Films Prepared by Reactive Magnetron Sputtering by : Bengt Olof Johansson

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