Doping Engineering for Front-End Processing:

Download or read book Doping Engineering for Front-End Processing: written by B. J. Pawlak and published by Cambridge University Press. This book was released on 2014-06-05 with total page 336 pages. Available in PDF, EPUB and Kindle. Book excerpt: Materials scientists, silicon technologists and TCAD researchers come together in this book to share experimental results and physical models, discuss achievements and challenges, and identify key issues for future research in this field. The volume focuses on many aspects related to doping of semiconductors (Si, SiGe and Ge) for device fabrication, and explores areas for single-gate as well as multi-gate devices with planar and vertical architectures. Surface properties, coverage, bonding saturation and passivation, and annealing ambient are also discussed.