Mechanical Properties of Silicon Based Compounds: Silicides
Author | : Joshua Pelleg |
Publisher | : |
Total Pages | : 272 |
Release | : 2019 |
ISBN-10 | : 3030225992 |
ISBN-13 | : 9783030225995 |
Rating | : 4/5 (995 Downloads) |
Download or read book Mechanical Properties of Silicon Based Compounds: Silicides written by Joshua Pelleg and published by . This book was released on 2019 with total page 272 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book focuses on the mechanical properties of silicides for very large scale integration (VLSI) applications. It presents the fabrication process for bulk silicides and thin films, and list complete testing deformation for a variety of silicon based compounds. The author also presents dislocation in silicides, fatigue and fracture aspects. A special chapter is given on deformation in silicides in the nano scale. Composites and alloys are also considered.