Pulsed DC Reactive Magnetron Sputtering of Aluminum Nitride Thin Films
Author | : Jung Won Cho |
Publisher | : |
Total Pages | : 227 |
Release | : 2002 |
ISBN-10 | : OCLC:52972142 |
ISBN-13 | : |
Rating | : 4/5 ( Downloads) |
Book Synopsis Pulsed DC Reactive Magnetron Sputtering of Aluminum Nitride Thin Films by : Jung Won Cho
Download or read book Pulsed DC Reactive Magnetron Sputtering of Aluminum Nitride Thin Films written by Jung Won Cho and published by . This book was released on 2002 with total page 227 pages. Available in PDF, EPUB and Kindle. Book excerpt: Keywords: plasma diagnostics, thermal conductivity, AlN, pulsed DC sputtering.